Semiconductor UHP Gas Qualification

We Have a multitude of gas analysis equipment for site or laboratory analysis:

1. High performance particle counters starting at 10nm (0.01µm)
2. Servomex Delta F 760 Trace O2 and H2O Analysis Cart
3. Peak Performer GC FID (LDL – CO2 800ppt, CH4 500ppt, NMHC 800ppt)
4. Peak Performer GC RCP (LDL - CO 300ppt, H2 800 ppt)
5. Peak Performer GC PDD (LDL - N2 3ppb)
6. High Frequency Argon discharge detector
7. Multiple GC carts
8. Full Servomex DF range: DF550, DF310,…
9. Mocon Trace FID
10. Servomex trace CO and CO2
11. Multiple portable trace O2 and H2O analysers (10 – 15 of each)
12. Thermo UV Trace SO2 Analyser

Validation – Semiconductor and Microelectronics:

• Commission of Hook-up lines at BOSCH Semiconductors Manufacturing GmbH, Dresden – Pressure, Initial Helium Leak(1x10-⁹), Particles (0.1µm), Moisture (<1ppb) and Final Helium Leak(1x10-⁹)
• Commissioning and Validation of the following:

1. H2 tank at Intel Ireland - On site analysis of analytes H20, O2, Ar ,N2 ,THC, CO & CO2 <50 ppb
2. Spectra N2 plant at Intel Ireland - On site analysis of analytes H20, O2, Ar ,N2 ,THC, CO & CO2 <500ppb
3. N2 Tank at Linde Bluebell for Intel Ireland - On site analysis of analytes H20, O2, Ar ,N2 ,THC, CO & CO2 <500ppb
4. Routine validation of bulk helium tankers at Intel Ireland - Sample retrieval and laboratory analysis of VOC’s in bulk He <1 ppb
5. Commissioning and Validation of UHP O2 Tank at Analog Devices Ireland - On site analysis of analytes Ar ,N2 ,CH4 <50 ppb
6. Validation of OFA at Intel Ireland – Sample retrieval and lab analysis of VOC’s and Acetates in OFA <1 ppb
7. Ambient Air Analysis at Intel Ireland for Linde – Sample retrieval and laboratory analysis of multiple compounds including H2, CH4, C2H4,C2H6, H2S, NH3 Etc
8. Monitoring of LPO2 for Intel Ireland – On site analysis with dedicated oxygen analysers, sample system and recording equipment
9. Validation of new UHP Gas Lines at Intel and Analog Devices Ireland – On site analysis of trace O2, H20 and THC’s

Instrumentation – Semiconductor and Microelectronics:

• Design, Manufacture, Supply and Install UHP bulk gas analytical system at Analog Devices for O2 and H2O in Ar He N2 and O2 (H2O only).
• Supply UHP bulk gas analysers for Fab 10 Intel Ireland O2(ppt) and H2O(ppt).
• Commissioning and installation of Linde’s Spectra plant UHP analytical cabin.
• Design and manufacture of Intel’s breathing air analytical system for the measurement of O2 and CO.
• Supply and routine maintenance of Servomex, Delta F, Ametek, Peak Labs, MCM, VICI Valco, Siemens etc at Intel Ireland and Analog Devices.
• Design, supply and install of UHP H2 analysis system at Shin Etsu Handotai Europe.

Some of our Semiconductor customers include:

• Intel
• Analog Devices
• Exyte
• BOSCH
• Shin Etsu Handotai Europe
• Air Products
• Linde
• Seagate
• FST
• AMTS
• Air Liquide
• Tyndall Institute
• Deaxo
• M+W Group