Semiconductor UHP Gas Qualification

GAS has a multitude of gas analysis equipment for site or laboratory analysis:

  1. High performance particle counters starting at 10nm (0.01µm)
  2. Servomex Delta F 760 Trace O2 and H2O Analysis Cart
  3. Peak Performer GC FID (LDL – CO2 800ppt, CH4 500ppt, NMHC 800ppt)
  4. Peak Performer GC RCP (LDL - CO 300ppt, H2 800 ppt)
  5. Peak Performer GC PDD (LDL - N2 3ppb)
  6. High Frequency Argon discharge detector
  7. Multiple GC carts
  8. Full Servomex DF range: DF550, DF310,…
  9. Mocon Trace FID
  10. Servomex trace CO and CO2
  11. Multiple portable trace O2 and H2O analysers (10 – 15 of each)
  12. Thermo UV Trace SO2 Analyser

 

Validation – Semiconductor and Microelectronics:

  1. H2 tank at Intel Ireland - On site analysis of analytes H20, O2, Ar ,N2 ,THC, CO & CO2 <50 ppb
  2. Spectra N2 plant at Intel Ireland - On site analysis of analytes H20, O2, Ar ,N2 ,THC, CO & CO2 <500ppb
  3. N2 Tank at Linde Bluebell for Intel Ireland - On site analysis of analytes H20, O2, Ar ,N2 ,THC, CO & CO2 <500ppb
  4. Routine validation of bulk helium tankers at Intel Ireland - Sample retrieval and laboratory analysis of VOC’s in bulk He <1 ppb
  5. Commissioning and Validation of UHP O2 Tank at Analog Devices Ireland - On site analysis of analytes Ar ,N2 ,CH4 <50 ppb
  6. Validation of OFA at Intel Ireland – Sample retrieval and lab analysis of VOC’s and Acetates in OFA <1 ppb
  7. Ambient Air Analysis at Intel Ireland for Linde – Sample retrieval and laboratory analysis of multiple compounds including H2, CH4, C2H4,C2H6, H2S, NH3 Etc
  8. Monitoring of LPO2 for Intel Ireland – On site analysis with dedicated oxygen analysers, sample system and recording equipment
  9. Validation of new UHP Gas Lines at Intel and Analog Devices Ireland – On site analysis of trace O2, H20 and THC’s

 

Instrumentation – Semiconductor and Microelectronics:

 

Some of our Semiconductor customers include: