UHP Impurity Analysis

High-purity gases critical to the semiconductor manufacturing environment are increasingly sought-after to meet ever-higher production yields and quality thresholds. The speciality gases involved are either ultra-high purity (UHP) single-component gases or accurately prepared gas mixtures.

As the industry drives towards the production of smaller chip sizes, it leads to the requirement for UHP gases to achieve higher levels of purity, with the utmost reliability. During wafer production, excess chemical reactants and products may deposit on the substrate and other equipment. Because of the sensitive dimensions of electronic devices, even small particles can ruin the devices under fabrication.

Semiconductor fabs must, therefore, monitor their inert and reactive gases used during every process step such as implantation and deposition.

GAS design, supply and install complete analysis systems for online monitoring of trace impurities.